@article{maedaControlXYNano2006, title = {Control of an {{XY}} Nano\textendash{}Positioning Table for a Compact Nano-Machine Tool}, volume = {49}, number = {1}, journal = {JSME International Journal Series C}, author = {Maeda, G. and Sato, K. and Hashizume, H. and Shinshi, T.}, year = {2006}, pages = {21--27}, }